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Linear variable filter with high dispersion coefficient
Zhang, J.; J.-S. Gao and Y.-D. Li
2015
发表期刊Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号23期号:5页码:1221-1226
摘要On the basis of dual ion beam sputtering physical deposition method, a Linear Variable Filter (LVF) with a high transmittance and a high dispersion coefficient was fabricated by correction of linear gradual deposition rates. To get good quality, the linear varying trends of the two materials was matched to reduce their mismatch in film thickness correction processing. The spectral data of the LVF were obtained by the small spot method and the surface morphology and microstructure of the LVF were observed by a Scanning Electron Microscope (SEM). Tested results show that an all-dielectric LVF with an operating range of 650-1050 nm is obtained. In the range of 20 mm length, the center wavelength transmitted through LVF exhibits an excellent linear dependence (20 nm/mm), and the linearity error is within 5 nm along the direction of the wedge. The measured results indicate that the transmittance of the center wavelength is higher than 85%, and out-of-band transmittance is less than 0.1%. The LVF has good spectral characteristics and stability, thus can satisfy the system requirements for miniaturization, integration and stabilization. , 2015, Chinese Academy of Sciences. All right reserved.
文章类型期刊论文
收录类别EI
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/56137
专题中科院长春光机所知识产出
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GB/T 7714
Zhang, J.,J.-S. Gao and Y.-D. Li. Linear variable filter with high dispersion coefficient[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(5):1221-1226.
APA Zhang, J.,&J.-S. Gao and Y.-D. Li.(2015).Linear variable filter with high dispersion coefficient.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(5),1221-1226.
MLA Zhang, J.,et al."Linear variable filter with high dispersion coefficient".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.5(2015):1221-1226.
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