Correction of removal function of ion beam figuring highly steep off-axis asphere

	Correction of removal function of ion beam figuring highly steep off-axis asphere
	Tang, W.; W.-J. Deng; R.-G. Li; L.-G. Zheng and X.-J. Zhang
	2015
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	23 期号:6 页码:1572-1579
摘要	The effect of curvature change of a mirror surface on the removal function of ion beam figuring was explored. A new higher precision figuring method for a highly steep off-axis asphere was proposed by using a correction matrix to calculate the removal function in different dwell points. The coordinate transformation for the off-axis asphere was used to decrease the effect of steep change on the removal function, the material removal rate of ion beam figuring asphere was analyzed based on Sigmund sputtering theory and a mathematics model of the removal function of the ion beam figuring asphere was established to calculate the variation of the material removal rate in different well points. The FWHMs (full wave and half maximum) of removal functions on different dwell points were calculated based on projection theory. Then the correction matrix for removal function was obtained based on the dwell point matrix, by which the information of removal function on every dwell points was calculated. Furthermore, the dwell time could be computed by Computer Controlled Optical Surfacing (CCOS) theory. At last, the experiments were performed by combing with a simulation. A silicon off-axis sphere mirror with a size of 900 mm680 mm and an off-axis magnitude of 350 mm was figured. Obtained the RMS value of profile accuracy for the off-axis asphere mirror changes from 32.041 nm to 11.566 nm and the rate of convergence is up to 2.77. The experimental result demonstrates that the correction matrix for removal function of ion beam figuring satisfies the requirement of optical fabrication. , 2015, Chinese Academy of Sciences. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56090
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Tang, W.,W.-J. Deng,R.-G. Li,et al. Correction of removal function of ion beam figuring highly steep off-axis asphere[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(6):1572-1579.
APA	Tang, W.,W.-J. Deng,R.-G. Li,&L.-G. Zheng and X.-J. Zhang.(2015).Correction of removal function of ion beam figuring highly steep off-axis asphere.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(6),1572-1579.
MLA	Tang, W.,et al."Correction of removal function of ion beam figuring highly steep off-axis asphere".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.6(2015):1572-1579.

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