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Vertical external cavity surface emitting laser with dielectric film integrated on substrate
Li, X.-S.; Y.-Q. Ning; J.-J. Cui; X. Zhang; P. Jia; L. Qin; J.-L. Zhang; Y. Liu and L.-J. Wang
2015
发表期刊Faguang Xuebao/Chinese Journal of Luminescence
卷号36期号:5页码:572-576
摘要Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou 215163 Vertical cavity surface emitting laser (VCSEL) with external cavity which is filled by dielectric materials or air can achieve good beam quality and high power. Aiming at the problem of complex production process and loose structure of the external cavity, a kind of surface emitting laser with the dielectric film integrated on external cavity bottom substrate was designed. Multilayer dielectric insulation films grown on the surface of substrate, N-DBR, and P-DBR composed the coupled cavity structure, and the substrate was served as external cavity of VECSEL. This structure can suppress high order mode, so it can optimize the output spectrum and far-field divergence angle of beam characteristics. Based on the previous theory, we manufactured a VECSEL with active area of 200 m in diameter and external cavity length of 250 m. The device is carried out with continuous DC current of 3.4 A at room temperature, and the power is 260 mW, the divergence angle of far field is 3.8, the full width at half maximum of spectrum is 0.046 nm. Obviously, compared with conventional structure of bottom emitting VCSEL, the beam quality of VECSEL devices is improved. , 2015, Chines Academy of Sciences. All right reserved.
文章类型期刊论文
收录类别EI
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/55981
专题中科院长春光机所知识产出
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Li, X.-S.,Y.-Q. Ning,J.-J. Cui,et al. Vertical external cavity surface emitting laser with dielectric film integrated on substrate[J]. Faguang Xuebao/Chinese Journal of Luminescence,2015,36(5):572-576.
APA Li, X.-S..,Y.-Q. Ning.,J.-J. Cui.,X. Zhang.,P. Jia.,...&Y. Liu and L.-J. Wang.(2015).Vertical external cavity surface emitting laser with dielectric film integrated on substrate.Faguang Xuebao/Chinese Journal of Luminescence,36(5),572-576.
MLA Li, X.-S.,et al."Vertical external cavity surface emitting laser with dielectric film integrated on substrate".Faguang Xuebao/Chinese Journal of Luminescence 36.5(2015):572-576.
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