Analysis for groove density and spectral resolution of varied-line-space gratings in EUV spectrum

	Analysis for groove density and spectral resolution of varied-line-space gratings in EUV spectrum
	Li, W.-H.; Y.-X. Jiang; N. Wu; T. Zhang and K. Wang
	2015
发表期刊	Faguang Xuebao/Chinese Journal of Luminescence
卷号	36 期号:9 页码:1094-1100
摘要	For the varied line-space (VLS) grating used in the region of 50-150 nm, the spherical wave exposure system was used for the optimization design, and the groove density and spectra resolution of the different width grating were analyzed. The theory resolution ability is higher than 14000 when the grating width is 4 mm in the use of wavelength range, about 9000 when the grating width is 10 mm, and about 3000 when the grating width is 30 mm, respectively. The bigger the grating width is, the bigger the bending degree of groove is, and the lower the spectral resolution ability is. Therefore, spherical wave exposure system is only suitable for making the VLS grating with smaller width. , 2015, Chines Academy of Sciences. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/55980
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li, W.-H.,Y.-X. Jiang,N. Wu,et al. Analysis for groove density and spectral resolution of varied-line-space gratings in EUV spectrum[J]. Faguang Xuebao/Chinese Journal of Luminescence,2015,36(9):1094-1100.
APA	Li, W.-H.,Y.-X. Jiang,N. Wu,&T. Zhang and K. Wang.(2015).Analysis for groove density and spectral resolution of varied-line-space gratings in EUV spectrum.Faguang Xuebao/Chinese Journal of Luminescence,36(9),1094-1100.
MLA	Li, W.-H.,et al."Analysis for groove density and spectral resolution of varied-line-space gratings in EUV spectrum".Faguang Xuebao/Chinese Journal of Luminescence 36.9(2015):1094-1100.

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极紫外波段变栅距光栅刻槽密度变化及光谱分（1565KB）	期刊论文	作者接受稿	开放获取	CC BY-NC-SA	浏览请求全文