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Optical Properties Investigation of p-Type ZnO Film Based on Doping by Diffusion
F. Chen; D. Fang; S. P. Wang; X. Fang; J. L. Tang; H. F. Zhao; F. Fang; X. Y. Chu; J. H. Li; F. Wang; X. H. Wang; G. J. Liu; X. H. Ma and Z. P. Wei
2015
发表期刊Spectroscopy and Spectral Analysis
卷号35期号:7
文章类型期刊
其他摘要The main purpose of this paper is to investigate the optical properties of p-type ZnO film based on P doping.ZnO film was grown by Atomic layer deposition(ALD)on InP subsrate in this experiment,and phosphorus diffused into ZnO lattice by annealing treatment at different temperature(500,700℃).The optical properties of samples were investigated by photoluminescence( PL)spectroscopy,which indicated that the annealing temperature is the important factor influencing the phosphorus diffusion doping.The low-temperature PL spectra of the sample which annealed at 700℃for 1hexhibited acceptor related emission  peaks located at 3.351,3.311,3.246and 3.177eV,which were attributed to A°X,FA,DAP and DAP-1LO,respectively. The acceptor binding energy is estimated to be about 122meV,which is agreed with the theoretic values in phosphorus-doped ZnO films.In this paper,through thermal diffusion method to realize the p-type doped ZnO thin films,it solved the main problems  which limited the development of ZnO based optoelectronic devices,and has an important significance for the development of the ZnO semiconductor materials and ZnO based photoelectric device
收录类别sci
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/55934
专题中科院长春光机所知识产出
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F. Chen,D. Fang,S. P. Wang,et al. Optical Properties Investigation of p-Type ZnO Film Based on Doping by Diffusion[J]. Spectroscopy and Spectral Analysis,2015,35(7).
APA F. Chen.,D. Fang.,S. P. Wang.,X. Fang.,J. L. Tang.,...&X. H. Ma and Z. P. Wei.(2015).Optical Properties Investigation of p-Type ZnO Film Based on Doping by Diffusion.Spectroscopy and Spectral Analysis,35(7).
MLA F. Chen,et al."Optical Properties Investigation of p-Type ZnO Film Based on Doping by Diffusion".Spectroscopy and Spectral Analysis 35.7(2015).
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