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Roughness reduction of large-area high-quality thick Al films for echelle gratings by multi-step deposition method
Li, Z. Z.; J. S. Gao; H. G. Yang; T. T. Wang and X. Y. Wang
2015
发表期刊Optics Express
卷号23期号:18页码:23738-23747
摘要Generally, echelle grating ruling is performed on a thick Al film. Consequently, high-quality large-area thick Al films preparation becomes one of the most important factors to realize a high-performance large-size echelle grating. In this paper, we propose a novel multi-step deposition process to improve thick Al films quality. Compared with the traditional single-step deposition process, it is found that the multi-step deposition process can effectively suppress large-size grains growth resulting in a low surface roughness and high internal compactness of thick Al films. The differences between single- and multi-step deposition processes are discussed in detail. By using multi-step deposition process, we prepared high-quality large-area Al films with a thickness more than 10 mu m on a 520 mm x 420 mm neoceramic glass substrate. (C) 2015 Optical Society of America
收录类别SCI ; EI
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/55394
专题中科院长春光机所知识产出
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GB/T 7714
Li, Z. Z.,J. S. Gao,H. G. Yang,et al. Roughness reduction of large-area high-quality thick Al films for echelle gratings by multi-step deposition method[J]. Optics Express,2015,23(18):23738-23747.
APA Li, Z. Z.,J. S. Gao,H. G. Yang,&T. T. Wang and X. Y. Wang.(2015).Roughness reduction of large-area high-quality thick Al films for echelle gratings by multi-step deposition method.Optics Express,23(18),23738-23747.
MLA Li, Z. Z.,et al."Roughness reduction of large-area high-quality thick Al films for echelle gratings by multi-step deposition method".Optics Express 23.18(2015):23738-23747.
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