Path planning and parameter optimization of uniform removal in active feed polishing

	Path planning and parameter optimization of uniform removal in active feed polishing
	Liu, J.; S. Z. Wang; C. L. Zhang; L. H. Zhang and H. N. Chen
	2015
发表期刊	Optical Engineering
卷号	54 期号:6 页码:8
摘要	A high-quality ultrasmooth surface is demanded in short-wave optical systems. However, the existing polishing methods have difficulties meeting the requirement on spherical or aspheric surfaces. As a new kind of small tool polishing method, active feed polishing (AFP) could attain a surface roughness of less than 0.3 nm (RMS) on spherical elements, although AFP may magnify the residual figure error or mid-frequency error. The purpose of this work is to propose an effective algorithm to realize uniform removal of the surface in the processing. At first, the principle of the AFP and the mechanism of the polishing machine are introduced. In order to maintain the processed figure error, a variable pitch spiral path planning algorithm and the dwell time-solving model are proposed. For suppressing the possible mid-frequency error, the uniformity of the synthesis tool path, which is generated by an arbitrary point at the polishing tool bottom, is analyzed and evaluated, and the angular velocity ratio of the tool spinning motion to the revolution motion is optimized. Finally, an experiment is conducted on a convex spherical surface and an ultrasmooth surface is finally acquired. In conclusion, a high-quality ultrasmooth surface can be successfully obtained with little degradation of the figure and mid-frequency errors by the algorithm. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
收录类别	SCI ; EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/55332
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu, J.,S. Z. Wang,C. L. Zhang,et al. Path planning and parameter optimization of uniform removal in active feed polishing[J]. Optical Engineering,2015,54(6):8.
APA	Liu, J.,S. Z. Wang,C. L. Zhang,&L. H. Zhang and H. N. Chen.(2015).Path planning and parameter optimization of uniform removal in active feed polishing.Optical Engineering,54(6),8.
MLA	Liu, J.,et al."Path planning and parameter optimization of uniform removal in active feed polishing".Optical Engineering 54.6(2015):8.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Liu-2015-Path planni（2354KB）	期刊论文	作者接受稿	开放获取	CC BY-NC-SA	浏览下载