Study on the roughness evolution of optical surfaces during ion beam sputtering

	Study on the roughness evolution of optical surfaces during ion beam sputtering
	Liang, X.; X. Wang; Y. Q. Gu; J. J. Zheng; H. J. Yang and Y. X. Sui
	2015
发表期刊	Optical Engineering
卷号	54 期号:10 页码:16
摘要	Ion beam machining technology has been extensively adopted to obtain an ultraprecision surface in ultraviolet lithography optics. However, there exist complex mechanisms leading the surface to evolve complicated topographies and increasing roughness. We build a kinetic model integrating with the typical sputter theory and a bond-counting Monte Carlo algorithm based on the compound materials to investigate the surface roughness evolution during ion beam sputtering. The influences of primary sputter, reflection, secondary sputter, geometrical shadowing, redeposition, and thermal diffusion were all taken into consideration to compose a dynamic evolution process. In calculation, using this model the surface first possesses a period of smoothing and then goes into a roughening stage, where the roughness follows the regular power law. Quantitative analyses of surface roughness derived from calculations are also examined and compared with experiments. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)
收录类别	SCI ; EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/55319
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liang, X.,X. Wang,Y. Q. Gu,et al. Study on the roughness evolution of optical surfaces during ion beam sputtering[J]. Optical Engineering,2015,54(10):16.
APA	Liang, X.,X. Wang,Y. Q. Gu,J. J. Zheng,&H. J. Yang and Y. X. Sui.(2015).Study on the roughness evolution of optical surfaces during ion beam sputtering.Optical Engineering,54(10),16.
MLA	Liang, X.,et al."Study on the roughness evolution of optical surfaces during ion beam sputtering".Optical Engineering 54.10(2015):16.

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