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Growth orientation dependence of Si doping in GaAsN
Han, X. X.; C. Dong; Q. Feng; Y. Ohshita and M. Yamaguchi
2015
发表期刊Journal of Applied Physics
卷号117期号:5页码:4
摘要The incorporation of Si in GaAsN alloys grown simultaneously on (100), (311)A, (311)B, and (211)B GaAs substrates by the chemical beam epitaxy has been investigated. The decrease in electron concentration with the increasing N composition suggests the occurrence of N and Si interaction, whereas the interaction exhibits evidently different extent depending on the growth orientation. Combined with the secondary ion mass spectrometry and photoluminescence measurements, it is revealed that (311)B and (211)B are the promising substrate orientations to reduce the N-Si passivation and improve n-type Si doping in GaAsN over a wider N composition range. A surface bonding model is utilized to explain the plane polarity dependent incorporation behaviors of Si and N. (C) 2015 AIP Publishing LLC.
收录类别SCI ; EI
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/55264
专题中科院长春光机所知识产出
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Han, X. X.,C. Dong,Q. Feng,et al. Growth orientation dependence of Si doping in GaAsN[J]. Journal of Applied Physics,2015,117(5):4.
APA Han, X. X.,C. Dong,Q. Feng,&Y. Ohshita and M. Yamaguchi.(2015).Growth orientation dependence of Si doping in GaAsN.Journal of Applied Physics,117(5),4.
MLA Han, X. X.,et al."Growth orientation dependence of Si doping in GaAsN".Journal of Applied Physics 117.5(2015):4.
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