Fabrication method for inductive mesh film on spherical substrates

	Fabrication method for inductive mesh film on spherical substrates
	Feng, X. G.
	2015
发表期刊	International Journal of Nanotechnology
卷号	12 期号:10-12 页码:868-875
摘要	To fabricate an inductive mesh film with a micron grade line width on a concave spherical substrate, we put forward a laser direct writing method of concentric optical scan, and it means that the intersecting point of three kinematic axes and an optical axis is the curvature centre of concavity. The specific scanning way is separated into four steps. Firstly, a concave spherical substrate of coating photoresist is installed erectly on a horizontal shafting, and a laser beam is focused on the edge of photoresist surface. Afterward, the substrate and horizontal shafting rotate as a whole with the rotary of an erect shafting, a line is written on the photoresist surface while a rotation period is accomplished. Then, the laser beam is turned an angle at the pitching direction, and the substrate is rotated again a cycle, so another line is written. Repeating this way, we get a set of latitude lines. Finally, the substrate makes a quarter turn around the horizontal axis, and repeating preceding processes, we get a mesh figure of intersecting latitude lines. In the experiment part, we fabricate an inductive mesh film with a period 600 mu m and a line width 7 mu m on a concave spherical substrate.
收录类别	SCI ; EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/55243
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Feng, X. G.. Fabrication method for inductive mesh film on spherical substrates[J]. International Journal of Nanotechnology,2015,12(10-12):868-875.
APA	Feng, X. G..(2015).Fabrication method for inductive mesh film on spherical substrates.International Journal of Nanotechnology,12(10-12),868-875.
MLA	Feng, X. G.."Fabrication method for inductive mesh film on spherical substrates".International Journal of Nanotechnology 12.10-12(2015):868-875.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Feng-2015-Fabricatio（2589KB）	期刊论文	作者接受稿	开放获取	CC BY-NC-SA	浏览下载