Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Detection of medium-range-order structure in amorphous germanium films by spectroscopic ellipsometry | |
Wang, X. D.; B. Chen; H. F. Wang; B. Chen; S. J. Liu; Z. X. Cui; B. Li; J. B. Wang; S. M. Wang and Y. P. Li | |
2015 | |
发表期刊 | Journal of Applied Crystallography |
卷号 | 48页码:1011-1015 |
摘要 | Amorphous germanium (a-Ge) films in the thickness range of 5.2-370.7 nm were prepared by radio frequency magnetron sputtering. Spectroscopic ellipsometry analysis shows that less than 3% of medium-range order exists in a-Ge under the reported deposition conditions. |
收录类别 | SCI ; EI |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/55217 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Wang, X. D.,B. Chen,H. F. Wang,et al. Detection of medium-range-order structure in amorphous germanium films by spectroscopic ellipsometry[J]. Journal of Applied Crystallography,2015,48:1011-1015. |
APA | Wang, X. D..,B. Chen.,H. F. Wang.,B. Chen.,S. J. Liu.,...&S. M. Wang and Y. P. Li.(2015).Detection of medium-range-order structure in amorphous germanium films by spectroscopic ellipsometry.Journal of Applied Crystallography,48,1011-1015. |
MLA | Wang, X. D.,et al."Detection of medium-range-order structure in amorphous germanium films by spectroscopic ellipsometry".Journal of Applied Crystallography 48(2015):1011-1015. |
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