300 mm ruling engine producing gratings and echelles under interferometric control in China

	300 mm ruling engine producing gratings and echelles under interferometric control in China
	Li, X. T.; H. L. Yu; X. D. Qi; S. L. Feng; J. C. Cui; S. W. Zhang; Jirigalantu and Y. G. Tang
	2015
发表期刊	Applied Optics
卷号	54 期号:7 页码:1819-1826
摘要	The designs of 300 mm ruling engine producing gratings and echelles under interferometric control (CIOMP-2) are presented. A new ruling-tool carriage system and its driving mechanism-which are easy to manufacture-are proposed. A new blank carriage system, controlled by a dual-frequency laser interferometer and a piezoelectric actuator, is designed. The CIOMP-2 ruling engine can now rule grating blanks with dimensions up to 300 mm x 300 mm, and mainly rules gratings with grating constants between 10 and 2400 lines/ mm. The wavelength range of CIOMP-2 gratings is from ultraviolet to mid-infrared wavelengths. Experiments show that the new ruling-tool carriage system works well and stability of motion is improved with the help of a flexure-hinge structure, and the threefold standard deviation values of the blank carriage positioning errors are less than similar to 5 nm. For 600 line/ mm gratings (diffraction order m = -1), the scatter intensities and ghosts reach 10(-5) of the maximum intensity. The scatter intensities and ghost of gratings ruled with CIOMP-2 are low, and no Rowland ghosts are visible. The gratings ruled by CIOMP-2 have high diffraction efficiency and resolving power. CIOMP-2 can also produce varied-line-space, bend-line, and aberration-reducing gratings and echelles. (C) 2015 Optical Society of America
收录类别	SCI ; EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/55168
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li, X. T.,H. L. Yu,X. D. Qi,et al. 300 mm ruling engine producing gratings and echelles under interferometric control in China[J]. Applied Optics,2015,54(7):1819-1826.
APA	Li, X. T..,H. L. Yu.,X. D. Qi.,S. L. Feng.,J. C. Cui.,...&Jirigalantu and Y. G. Tang.(2015).300 mm ruling engine producing gratings and echelles under interferometric control in China.Applied Optics,54(7),1819-1826.
MLA	Li, X. T.,et al."300 mm ruling engine producing gratings and echelles under interferometric control in China".Applied Optics 54.7(2015):1819-1826.

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