The designs of 300 mm ruling engine producing gratings and echelles under interferometric control (CIOMP-2) are presented. A new ruling-tool carriage system and its driving mechanism-which are easy to manufacture-are proposed. A new blank carriage system, controlled by a dual-frequency laser interferometer and a piezoelectric actuator, is designed. The CIOMP-2 ruling engine can now rule grating blanks with dimensions up to 300 mm x 300 mm, and mainly rules gratings with grating constants between 10 and 2400 lines/ mm. The wavelength range of CIOMP-2 gratings is from ultraviolet to mid-infrared wavelengths. Experiments show that the new ruling-tool carriage system works well and stability of motion is improved with the help of a flexure-hinge structure, and the threefold standard deviation values of the blank carriage positioning errors are less than similar to 5 nm. For 600 line/ mm gratings (diffraction order m = -1), the scatter intensities and ghosts reach 10(-5) of the maximum intensity. The scatter intensities and ghost of gratings ruled with CIOMP-2 are low, and no Rowland ghosts are visible. The gratings ruled by CIOMP-2 have high diffraction efficiency and resolving power. CIOMP-2 can also produce varied-line-space, bend-line, and aberration-reducing gratings and echelles. (C) 2015 Optical Society of America
Li, X. T.,H. L. Yu,X. D. Qi,et al. 300 mm ruling engine producing gratings and echelles under interferometric control in China[J]. Applied Optics,2015,54(7):1819-1826.
APA
Li, X. T..,H. L. Yu.,X. D. Qi.,S. L. Feng.,J. C. Cui.,...&Jirigalantu and Y. G. Tang.(2015).300 mm ruling engine producing gratings and echelles under interferometric control in China.Applied Optics,54(7),1819-1826.
MLA
Li, X. T.,et al."300 mm ruling engine producing gratings and echelles under interferometric control in China".Applied Optics 54.7(2015):1819-1826.
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