压电陶瓷两维偏摆镜驱动系统的设计

	压电陶瓷两维偏摆镜驱动系统的设计
其他题名	Design of Driving System for Piezoelectric Bidimensional Oscillating Mirror
	吴伊玲
学位类型	硕士
导师	刘廷霞
	2015
学位授予单位	中国科学院大学
学位专业	机械工程
关键词	压电陶瓷两维偏摆镜驱动控制系统改进非对称pi迟滞模型前馈pid控制
摘要	光束合成设备中，为每台激光器配备了相应的压电陶瓷两维偏摆镜来补偿激光的光路偏移。项目中偏摆镜在两个方向的摆角行程范围都要不小于±1mrad，偏摆镜的整行程重复定位精度要优于20μrad。因此，需要设计压电陶瓷两维偏摆镜的驱动系统，实现高精度的定位要求。本设计首先建立了压电陶瓷两维偏摆镜驱动系统硬件的总体框架，论述了各个模块的设计原理，包括控制模块、驱动电源模块、检测回路模块。控制模块主要讨论了DSP芯片和FPGA芯片选择及其外围电路设计、D/A转换电路和A/D转换电路设计；驱动电源模块包括原理及需求分析、器件的选择、电路的设计等；检测回路模块主要论述了放大电路的工作原理和电路设计。接着对所设计的硬件电路的性能进行了测试，实验表明该硬件电路的各项指标都能满足要求。然后，在压电陶瓷迟滞特性的基础上，建立了改进非对称PI迟滞模型，解决了迟滞曲线非对称的问题，使得拟合精度提高了。基于改进非对称PI迟滞模型，采用二分法设计了前馈控制算法，补偿掉压电陶瓷的迟滞特性导致的非线性。然后进行PID反馈控制算法的设计，将前馈控制与反馈控制结合得到了复合控制算法，使得跟踪精度达到了16.2μrad。本文重点关注了小角度偏转条件下驱动方式的选择问题以及怎样提高控制精度问题。理论研究和实验表明，这项研究工作提高了压电陶瓷的性能，对压电陶瓷两维偏摆镜在光束合成设备中的应用具有重要的理论意义和实际价值。
其他摘要	In the device of combining light beam, each optical maser is equipped with piezoelectric bidimensional oscillating mirrors to compensate the light path excursion of the laser. In the project, the deflection angle of the oscillating mirrors in two directions must be less than ±1mrad and the whole travel positional accuracy must be within 20μrad. So Driving System of the bidimensional oscillating mirror should be designed to realize the requirement of high positional accuracy. General framework about the hardware of the piezoelectric bidimensional oscillating mirror’s driving system is built in this design. The principle of each module including control module、driving power module and detection circuit loop module is discussed. The choose and peripheral circuit design of DSP chip and FPGA chip、circuit design of DAC and ADC is discussed in the control module. Principle、requirement analysis、chip choosing and circuit design is included in the driving power module. The working principle of amplifying circuit and the circuit design is discussed in the detection circuit loop module. Performance of the hardware circuit is tested in the next step and experiment results show that each target of the hardware circuit can meet the requirements. Then the modified asymmetric PI hysteresis module is built based on the hysteresis of Piezoelectric. Problem about asymmetric hysteresis curve is solved and the fitting precision is improved. Based on the modified asymmetric PI hysteresis module, feedforward control arithmetic is designed with the method of bisection. The feedforward control arithmetic can compensate for the nonlinearity which is caused by the hysteresis of Piezoelectric. Then the PID feedback control arithmetic is designed. The feedforward control arithmetic is combined with the feedback control arithmetic and the compound control arithmetic can be created. The tracking accuracy can reach 16.2μrad. In this thesis, the drive mode is payed close attention to in the condition of deflexion with a small angle. Theoretical research and experiments show that the performance of the piezoelectric is improved in this research and this research has great theoretical significance and practical value in the use of the device of combining light beam with piezoelectric bidimensional oscillating mirrors.
语种	中文
文献类型	学位论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/49305
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	吴伊玲. 压电陶瓷两维偏摆镜驱动系统的设计[D]. 中国科学院大学,2015.

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