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基于色差共焦原理的透镜中心厚度测量设备的研制
其他题名The development of lens central thickness measurement based onconfocal principle
周勇
学位类型硕士
导师孙强
2015-10
学位授予单位中国科学院大学
学位专业光学工程
关键词透镜中心厚度 色差共焦原理 设备研制 系统设计
摘要透镜应用广泛,而透镜中心厚度是透镜的一个重要参数,其对透镜的焦距 以及光学系统的成像质量均有较大影响。透镜中心厚度的加工是否满足要求, 需要高精度的测量设备对其进行测量。故此研制一款高精度、快速、简便、稳 定性好的透镜中心厚度测量设备是十分必要的。为了能够快速,简便地测量透 镜中心厚度,本文基于色差共焦原理研制了一款透镜中心厚度测量设备,它的 测量范围广、测量精度高、测量时间短、测量方法简便且稳定性好。本文的主 要研究工作如下: 1.根据现有的透镜中心厚度测量设备的技术路线及发展趋势,选择使用色 差共焦法对透镜中心厚度进行测量。本文详细地研究了色差共焦原理以及利用 色差共焦原理对透镜中心厚度进行测量的机理,研究表明利用色差共焦法进行 透镜中心厚度测量是一种可行的、简便的、快速的方法。 2.完成了色差共焦系统出射光光谱带宽进行了研究,为色差共焦系统的设 计提供科学的指导。研究表明:色差共焦系统像方数值孔径,共焦小孔尺寸, 出射光光谱峰值波长等都会影响共焦小孔处出射光光谱带宽。 3.根据测量原理以及测量需求,完成了设备设计指标的确定以及可行性分 析。将该设备的最大测量值设计为30 mm 左右,测量精度为±6 μm 以内。4.完成了色差共焦系统的设计及其子系统的设计和选择,其中包括光源、 色差镜头、共焦小孔、分光系统等,为色差共焦系统的设计提供科学指导以及 参考。 5.设计了透镜中心定位方法,该方法能够快速、简便地找到透镜的顶点位 置。大大地简便了调节被测透镜的光轴与色差镜头的光轴共线的过程。利用这 种方法,可以在在很大程度上减少测量所需要的准备时间。 6.编写了透镜中心厚度计算程序,并详细介绍了透镜中心厚度的计算方 法,其中包括峰值波长的测量方法以及透镜的厚度的计算算法。 7.利用研制出的设备,对一系列的标准厚度的透镜进行测量实验,实验结 果表明该测量设备最大测量范围可达30 mm,精度为±5 μm,测量时间小于2 s, 适用于大批量透镜中心厚度检测。
其他摘要Optical lens has been applied in many fields such as industrial inspection, security monitoring, defense and military. The lens central thickness is an important parameter of lens, which has a significant effect on the focal length of lens and image quality of optical system. Thus, it is necessary to develop a equipment with high precision in order to measure lens central thickness.The equipment introduced in this paper is based on confocal principle. It can fast simply measure lens central thickness with a high degree of precision. This paper’s main research work is as follow: 1.Taking into consideration of the current technology and the future development trends of lens central thickness measuring equipment, the paper studies the method of measuring lens central thickness using chromatic confocal system. The chromatic confocal principle and the method of measuring lens central thickness using chromatic confocal system are introduced in detail. The research shows that it’s a feasible simple fast way to measure lens central thickness. 2.The spectrum bandwidth of emergent light in the system is researched, and the results show that the image space numerical aperture and the confocal hole radius are main factors which influence the spectrum bandwidth of emergent light. The research provides a scientific guidance for the design and development of the optical system. 3.The design indexes of the equipment are established in consideration of the measuring principle and measuring demand. The equipment whose maximum measurable lens thickness is about 30 mm and measuring accuracy is within ±6 μm is required. 4.The design of chromatic confocal system and its subsystem which consist of light source, chromatic lens, confocal hole and beam splitting system are introduced in this paper. It can provide a scientific guidance and reference for other confocal system. 5.We devise a new way to make the optical axis of measured lens and the optical axis of chromatic lens collinear. In this way, we can minimize measuring time. 6.The software of lens central thickness measurement is programmed. Algorithms of peak wavelength calculation and lens central thickness are researched. 7.We develop the equipment successfully. And a series of measuring experiment using the equipment has been done, and the results show that the maximum measurable lens thickness is more than 30 mm by using this equipment. What’s more, the measuring accuracy is ±5.0 μm. So the equipment is suitable for measuring lens central thickness of the in large quantity.
语种中文
文献类型学位论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/49276
专题中科院长春光机所知识产出
推荐引用方式
GB/T 7714
周勇. 基于色差共焦原理的透镜中心厚度测量设备的研制[D]. 中国科学院大学,2015.
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