Wave-front reconstruction with Hartmann-Shack sensor using a phase-retrieval method

	Wave-front reconstruction with Hartmann-Shack sensor using a phase-retrieval method
	Li J.; Gong Y.; Chen H.; Hu X.
	2014
发表期刊	Optics Communications
ISSN	ISBN/00304018
期号	336 页码:127-133
摘要	We apply a phase retrieval algorithm to the intensity patterns acquired from a Hartmann-Shack wave-front sensor to measure the wave-front aberration of a deep ultraviolet lithography system. The intensity patterns are obtained with and without the micro-lens array. Thus, we avoid selecting algorithm-specific parameters such as step-size and trust-region. Simulation results show that the phase-retrieval method enhances the accuracy of wave-front reconstruction compared with the conventional wave-front slope method. The relationships between the number of iterations of the phase retrieval algorithm, the calculating time and the wave-front reconstruction error are studied. This study demonstrates that the phase-retrieval method provides more accurate estimates of aberrations in near-flat wave-fronts relative to the wave-front slope method. 2014 Elsevier Ltd. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44507
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li J.,Gong Y.,Chen H.,et al. Wave-front reconstruction with Hartmann-Shack sensor using a phase-retrieval method[J]. Optics Communications,2014(336):127-133.
APA	Li J.,Gong Y.,Chen H.,&Hu X..(2014).Wave-front reconstruction with Hartmann-Shack sensor using a phase-retrieval method.Optics Communications(336),127-133.
MLA	Li J.,et al."Wave-front reconstruction with Hartmann-Shack sensor using a phase-retrieval method".Optics Communications .336(2014):127-133.

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