Thermal and stress studies of the 30.4 nm Mo/Si multilayer mirror for the moon-based EUV camera

	Thermal and stress studies of the 30.4 nm Mo/Si multilayer mirror for the moon-based EUV camera
	Li Y. P.; Zhang H. J.; Wang H. F.; He F.; Wang X. D.; Liu Y.; Han S. L.; Zheng X.; Chen B.; Li H. B.; Cao J. L.
	2014
发表期刊	Applied Surface Science
ISSN	ISBN/0169-4332
期号	317 页码:902-907
摘要	To investigate the environmental adaptability of the Mo/Si multilayers on lunar surface, we studied the stability and stress of Mo/Si multilayers under the low and high temperature environment. The in-situ X-ray diffraction (XRD) and the ex-situ intrinsic stress are measured in the temperature range from - 135 degrees C to 600 degrees C and from 190 degrees C to 600 degrees C, respectively. The results demonstrate that the periodic structure of Mo/Si multilayers is stable between 135 degrees C and 300 degrees C. The stress is unaffected under low temperature and it gradually increases from 260 MPa to 1G MPa when the temperature changes from room temperature to 600 degrees C. Above 600 degrees C, large tensile stress leads to folds and cracks in the film. Thus, the large temperature range on lunar surface has little effect on the structure, performance and stress of the Mo/Si multilayers and the high temperature in lunar day releases the stress of the multilayer mirror. (C) 2014 Elsevier B.V. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44465
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li Y. P.,Zhang H. J.,Wang H. F.,et al. Thermal and stress studies of the 30.4 nm Mo/Si multilayer mirror for the moon-based EUV camera[J]. Applied Surface Science,2014(317):902-907.
APA	Li Y. P..,Zhang H. J..,Wang H. F..,He F..,Wang X. D..,...&Cao J. L..(2014).Thermal and stress studies of the 30.4 nm Mo/Si multilayer mirror for the moon-based EUV camera.Applied Surface Science(317),902-907.
MLA	Li Y. P.,et al."Thermal and stress studies of the 30.4 nm Mo/Si multilayer mirror for the moon-based EUV camera".Applied Surface Science .317(2014):902-907.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Li-2014-Thermal and （1899KB）			开放获取	CC BY-ND	浏览下载