Testing of large aperture and large departure aspheric mirror by compound method

	Testing of large aperture and large departure aspheric mirror by compound method
	Wang X.
	2014
发表期刊	Guangxue Xuebao/Acta Optica Sinica
ISSN	ISBN/02532239
卷号	34
摘要	In order to overcome the difficulty of testing large aperture and large departure asphere, the compound method syncretizes interferometry, null compensation, Hartman wavefront detect and subaperture stitching interferometry (SSI) is proposed. The basic principle and flow chart of this method are analyzed and researched. When the aspheric surface has been grinded, the null compensation setup is aligned and calibrated, and the beam splitter is inserted to make the Hartman wavefront sensor test the subaperture of the large asphere, then the phase map of the whole aperture is obtained by the synthetical optimization stitching algorithm. When the peak-valley (PV) of the surface error is less than 5(=632.8 nm), a large aspheric surface is tested by the compound method, the PV and root mean square (RMS) of the surface error between them is 0.11 and 0.004, respectively. The latter polishing of the aspheric mirror is made according to the synthetical evaluation of the two methods. The final testing of the RMS of the figure error is less than /50.
收录类别	EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44444
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Wang X.. Testing of large aperture and large departure aspheric mirror by compound method[J]. Guangxue Xuebao/Acta Optica Sinica,2014,34.
APA	Wang X..(2014).Testing of large aperture and large departure aspheric mirror by compound method.Guangxue Xuebao/Acta Optica Sinica,34.
MLA	Wang X.."Testing of large aperture and large departure aspheric mirror by compound method".Guangxue Xuebao/Acta Optica Sinica 34(2014).

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