CIOMP OpenIR  > 中科院长春光机所知识产出
Sub-micron precision measurement of radius of curvature and uncertainties analysis
Peng S.; Miao E.
2014
发表期刊Guangxue Xuebao/Acta Optica Sinica
ISSNISBN/02532239
卷号34期号:5
摘要For the demanding of high precision optical system, a vertical Fizeau type interferometer, combining with dual-frequency laser displacement measuring interferometer, achieve submicron precision measurement of radius of curvature (ROC) in this article. In order to verify the credibility of the measurement system, a series of optical parts with different ROC are measured by two different reference transmission spherical respectively. Take the polished SiC sphere as an example, the main factors causing the measurement errors are analyzed in detail. Combining with the uncertainty theory, the uncertainties of the measurement results of ROC for SiC sphere is about 0.13 m (a level of confidence of approximately 95% assuming a normal distribution), which demonstrate the measurement system meets the requirement of sub-micron accuracy measurement of ROC. The correctness of the final results measured is verified through the cross measurement of the same component by the coordinate measurement machine.
收录类别EI
语种中文
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/44420
专题中科院长春光机所知识产出
推荐引用方式
GB/T 7714
Peng S.,Miao E.. Sub-micron precision measurement of radius of curvature and uncertainties analysis[J]. Guangxue Xuebao/Acta Optica Sinica,2014,34(5).
APA Peng S.,&Miao E..(2014).Sub-micron precision measurement of radius of curvature and uncertainties analysis.Guangxue Xuebao/Acta Optica Sinica,34(5).
MLA Peng S.,et al."Sub-micron precision measurement of radius of curvature and uncertainties analysis".Guangxue Xuebao/Acta Optica Sinica 34.5(2014).
条目包含的文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
亚微米高精度曲率半径测量及其不确定度分析(314KB) 开放获取CC BY-ND浏览 请求全文
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Peng S.]的文章
[Miao E.]的文章
百度学术
百度学术中相似的文章
[Peng S.]的文章
[Miao E.]的文章
必应学术
必应学术中相似的文章
[Peng S.]的文章
[Miao E.]的文章
相关权益政策
暂无数据
收藏/分享
文件名: 亚微米高精度曲率半径测量及其不确定度分析_彭石军.caj
格式: caj
此文件暂不支持浏览
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。