Sub-micron precision measurement of radius of curvature and uncertainties analysis

	Sub-micron precision measurement of radius of curvature and uncertainties analysis
	Peng S.; Miao E.
	2014
发表期刊	Guangxue Xuebao/Acta Optica Sinica
ISSN	ISBN/02532239
卷号	34 期号:5
摘要	For the demanding of high precision optical system, a vertical Fizeau type interferometer, combining with dual-frequency laser displacement measuring interferometer, achieve submicron precision measurement of radius of curvature (ROC) in this article. In order to verify the credibility of the measurement system, a series of optical parts with different ROC are measured by two different reference transmission spherical respectively. Take the polished SiC sphere as an example, the main factors causing the measurement errors are analyzed in detail. Combining with the uncertainty theory, the uncertainties of the measurement results of ROC for SiC sphere is about 0.13 m (a level of confidence of approximately 95% assuming a normal distribution), which demonstrate the measurement system meets the requirement of sub-micron accuracy measurement of ROC. The correctness of the final results measured is verified through the cross measurement of the same component by the coordinate measurement machine.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44420
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Peng S.,Miao E.. Sub-micron precision measurement of radius of curvature and uncertainties analysis[J]. Guangxue Xuebao/Acta Optica Sinica,2014,34(5).
APA	Peng S.,&Miao E..(2014).Sub-micron precision measurement of radius of curvature and uncertainties analysis.Guangxue Xuebao/Acta Optica Sinica,34(5).
MLA	Peng S.,et al."Sub-micron precision measurement of radius of curvature and uncertainties analysis".Guangxue Xuebao/Acta Optica Sinica 34.5(2014).

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