Study on metrology and alignment of 150 mm SiC convex hyperboloidal mirror

	Study on metrology and alignment of 150 mm SiC convex hyperboloidal mirror
	Chen X.; Zhang B.
	2014
发表期刊	Guangxue Xuebao/Acta Optica Sinica
ISSN	ISBN/02532239
卷号	34
摘要	In order to realize the optical measurement of 150 mm SiC convex hyperboloidal mirror, the traditional Hindle sphere testing, Simpson Hindle testing and aspheric plate testing methods are designed. These methods are compared in accuracy, tolerance, et al.. The Hindle sphere testing is chosen because of higher accuracy, loose tolerance and simple support structure. After grinding and polishing, the surface error is 0.023 (mean square root). In the alignment, a method based on laser tracker and interferometric testing of Hindle sphere is proposed. The sphere mounted retrofeflector of laser tracker is interferometric tested and the positions are measured, which are corresponding to the two geometry focuses of hyperboloidal surface. Then the vetex radius and conic constant can be calculated by the data. The error analysis shows that the accuracy are 0.053 mm and 9.610-5 for the vertex radius and conic constant, respectively.
收录类别	EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44406
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Chen X.,Zhang B.. Study on metrology and alignment of 150 mm SiC convex hyperboloidal mirror[J]. Guangxue Xuebao/Acta Optica Sinica,2014,34.
APA	Chen X.,&Zhang B..(2014).Study on metrology and alignment of 150 mm SiC convex hyperboloidal mirror.Guangxue Xuebao/Acta Optica Sinica,34.
MLA	Chen X.,et al."Study on metrology and alignment of 150 mm SiC convex hyperboloidal mirror".Guangxue Xuebao/Acta Optica Sinica 34(2014).

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
BOJ141202000018NkQnT（3200KB）			开放获取	CC BY-ND	浏览下载