Serial mode combined polishing of high-quality flat mirror

	Serial mode combined polishing of high-quality flat mirror
	Zhang F.
	2014
发表期刊	中文 Optics Letters
ISSN	ISBN/16717694
卷号	12
摘要	In order to obtain high-quality flat mirror, a serial mode combined polishing technology, consisting of continuous polishing (CP) and ion beam figuring (IBF), is presented. The function of CP technology is to get certain figure accuracy and meet the requirements of the surface roughness of the flat mirror. The final high figure accuracy of the flat mirror is achieved by the IBF technology. We introduce the polishing principles of CP and IBF and then, the polishing experiment and material removal function of IBF are studied. Finally, a 160 mm flat mirror is polished by a serial mode combined polishing technology. After serial mode combined polishing, the surface error and roughness of the flat mirror are 2.06 and 0.42 nm RMS, respectively. The experiment results indicate that the serial mode combined polishing technology is effective for polishing ultra-precise flat mirror.
收录类别	EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44362
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang F.. Serial mode combined polishing of high-quality flat mirror[J]. 中文 Optics Letters,2014,12.
APA	Zhang F..(2014).Serial mode combined polishing of high-quality flat mirror.中文 Optics Letters,12.
MLA	Zhang F.."Serial mode combined polishing of high-quality flat mirror".中文 Optics Letters 12(2014).

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