Research of monolithic XY micro-adjustment mechanism based on compliance matrix

	Research of monolithic XY micro-adjustment mechanism based on compliance matrix
	Zhang D.; Zhao L.
	2014
发表期刊	Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument
ISSN	ISBN/02543087
卷号	35 期号:2 页码:269-275
摘要	A monolithic flexible redundant parallel mechanism is investigated for the XY micro-adjustment in lithographic projection lens. Firstly, the composition and working principle of the mechanism are introduced. Secondly, the compliance matrix method is illustrated according to the parameters of the uniaxis circular flexure hinge. Then, the compliances of the adjustment arms, the output compliance, the input compliance and the displacement input-output ratio of the mechanism are deduced using the proposed method. Finally, finite element analysis, theoretical calculation and experimental verification for the mechanism are carried out. Experimental results show that the deviations of the output compliance, input compliance and input-output ratio obtained from theoretical calculation are 16.272%, 28.326% and 31.126%, respectively compared with those of the finite element method. The deviation of the input-output ratio obtained from theoretical calculation is 4.751% compared with the test result of the experiment. The offsets are mainly caused by the inaccuracy of the compliance coefficients in the compliance matrix method and neglecting the link compliance between the hinges. The adjustment stroke of the mechanism meets the requirement of 50 m within the actuating force range of 50 N, the maximum stress on the frame is less than the yield limit. The Tip/Tilt parasitic error induced by eccentricity adjusting is less than 0.5. The proposed XY micro-adjustment mechanism can satisfy the system requirement of eccentricity compensation in lithographic projection lens.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44335
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang D.,Zhao L.. Research of monolithic XY micro-adjustment mechanism based on compliance matrix[J]. Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument,2014,35(2):269-275.
APA	Zhang D.,&Zhao L..(2014).Research of monolithic XY micro-adjustment mechanism based on compliance matrix.Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument,35(2),269-275.
MLA	Zhang D.,et al."Research of monolithic XY micro-adjustment mechanism based on compliance matrix".Yi Qi Yi Biao Xue Bao/中文 Journal of Scientific Instrument 35.2(2014):269-275.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
基于柔度矩阵法的整体式XY光学微调整机构（660KB）			开放获取	CC BY-ND	浏览下载