Pupil non-balance calibration for lithographic lens

	Pupil non-balance calibration for lithographic lens
	Rui D.; Shi Z.; Yuan W.; Zhang W.
	2014
发表期刊	Zhongguo Jiguang/中文 Journal of Lasers
ISSN	ISBN/02587025
卷号	41 期号:9
摘要	As one of the critical target of lithographic lens, pupil non-balance is modulated by many factors. It is necessary to distinguish the respective contribution of those factors. In this paper, a method is introduced to calibrate pupil balance by removing telecentriciy, and a comparison is made with another approach based on finding centroid. A user defined program, which is written in Matlab with the function of manipulating Code V and LightTools data, is consequently made up to implement the above technique and calculate the real position of pupil intensity in angular plane without telecentircity. Beside, a series of simulation on an optimally designed lithographic lens under off-axis illumination is given to show the verification. It is revealed that this method is functional in calibrating pupil non-balance with a high level of implement efficiency.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44297
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Rui D.,Shi Z.,Yuan W.,et al. Pupil non-balance calibration for lithographic lens[J]. Zhongguo Jiguang/中文 Journal of Lasers,2014,41(9).
APA	Rui D.,Shi Z.,Yuan W.,&Zhang W..(2014).Pupil non-balance calibration for lithographic lens.Zhongguo Jiguang/中文 Journal of Lasers,41(9).
MLA	Rui D.,et al."Pupil non-balance calibration for lithographic lens".Zhongguo Jiguang/中文 Journal of Lasers 41.9(2014).

条目包含的文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
光刻物镜光瞳极平衡性标定方法.caj（390KB）			开放获取	CC BY-ND	浏览请求全文