Maskless lithography illumination system with double freeform surfaces for beam shaping

	Maskless lithography illumination system with double freeform surfaces for beam shaping
	Meng X.; Liu W.; Wei Z.; Liu H.; Kang Y.; Feng R.; Zhang D.
	2014
发表期刊	Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
ISSN	ISBN/10072276
卷号	43 期号:5 页码:1505-1510
摘要	In order to achieve the illumination of maskless lithography by rectangular collimated flat-top laser beam and improve the illumination efficiency, a design method of the illumination system using double freeform surfaces shaping unit was proposed. Based on the optical path constant condition and Snell's refraction law, the surfaces equations in integral form of the freeform surfaces were derived. The integral equations were solved by numerical calculation. The illumination systems using two-lens shaping unit and single-lens shaping unit which included double freeform surfaces were designed and simulated by optical design software. The simulated results show that the uniformity is over 93% and the illumination efficiency is over 91%. It is illustrated that the two kinds of shaping unit could meet the requirements of the illumination of maskless lithography.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44141
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Meng X.,Liu W.,Wei Z.,et al. Maskless lithography illumination system with double freeform surfaces for beam shaping[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2014,43(5):1505-1510.
APA	Meng X..,Liu W..,Wei Z..,Liu H..,Kang Y..,...&Zhang D..(2014).Maskless lithography illumination system with double freeform surfaces for beam shaping.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,43(5),1505-1510.
MLA	Meng X.,et al."Maskless lithography illumination system with double freeform surfaces for beam shaping".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 43.5(2014):1505-1510.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
采用双自由曲面整形的无掩模光刻照明系统_（893KB）			开放获取	CC BY-ND	浏览下载