Investigations of high-quality aluminum film with large-area uniformity for large-size echelle grating

	Investigations of high-quality aluminum film with large-area uniformity for large-size echelle grating
	Li Z.-Z.; Yang H.-G.; Wang X.-Y.; Gao J.-S.
	2014
发表期刊	Wuli Xuebao/Acta Physica Sinica
ISSN	ISBN/10003290
卷号	63 期号:15
摘要	Large-size echelle grating can have extremely high spectral resolution due to its large aperture and high diffractive order. To achieve high-performance large-size echelle grating, the preparation of high-quality aluminum film with large-area uniformity is one of the most important factors. In this paper, for the first time so far as we know, we report the preparation process of high-quality aluminum with large-area uniformity in details. First, we simulate theoretically the influence of the position and emission characteristic of the evaporation source, as well as the fixture height, on aluminum film uniformity. Then, we study the influence of some key parameters of the evaporation process (such as the evaporation height and rate) on aluminum film quality and uniformity. Finally, under the optimal conditions, we prepared successfully the high-quality aluminum film with its thickness being larger than 10 m and uniformity fluctuations less than 1% within a diameter of 700 mm. 2014 中文 Physical Society.
收录类别	EI
语种	中文
WOS记录号	WOS:000340640300055
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44114
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li Z.-Z.,Yang H.-G.,Wang X.-Y.,et al. Investigations of high-quality aluminum film with large-area uniformity for large-size echelle grating[J]. Wuli Xuebao/Acta Physica Sinica,2014,63(15).
APA	Li Z.-Z.,Yang H.-G.,Wang X.-Y.,&Gao J.-S..(2014).Investigations of high-quality aluminum film with large-area uniformity for large-size echelle grating.Wuli Xuebao/Acta Physica Sinica,63(15).
MLA	Li Z.-Z.,et al."Investigations of high-quality aluminum film with large-area uniformity for large-size echelle grating".Wuli Xuebao/Acta Physica Sinica 63.15(2014).

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