Investigation and design for structure of high-precision reference mirror

	Investigation and design for structure of high-precision reference mirror
	Ding L.; Wang T.; Yang H.; Jia H.
	2014
发表期刊	Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
ISSN	ISBN/10072276
卷号	43 期号:4 页码:1172-1175
摘要	In order to ensure the measuring precision of high accuracy optical, the accuracy of the interferometer reference mirror must be controlled strictly. The influences of different number of adhered points and point distribution, and different support schemes on the shapes of reference mirror were investigated by means of finite element method under gravitational conditions. In order to achieve the peak to valley(PV) value of reference sphere mirror which is better than /40, a kind of support structure of 150 mm reference mirror was designed according to the results of research. The experimental results by means of finite element method indicate that the peak to valley (PV) value and root mean square (RMS) value of the reference surface are only 7.36 nm and 1.52 nm by support scheme with 12 3 distributed and six-points flexible support, and the thermal deformation is less than gravity deformation. These results demonstrate that all targets validate the rationality of structure and it can well satisfy the requirements.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44107
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Ding L.,Wang T.,Yang H.,et al. Investigation and design for structure of high-precision reference mirror[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2014,43(4):1172-1175.
APA	Ding L.,Wang T.,Yang H.,&Jia H..(2014).Investigation and design for structure of high-precision reference mirror.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,43(4),1172-1175.
MLA	Ding L.,et al."Investigation and design for structure of high-precision reference mirror".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 43.4(2014):1172-1175.

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