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Inverse axial mounting stiffness design for lithographic projection lenses
Yuan Q.; Shang H. B.; Zhang W.
2014
发表期刊Applied Optics
ISSNISBN/1559-128X
卷号53期号:25页码:5720-5725
摘要In order to balance axial mounting stiffness of lithographic projection lenses and the image quality under dynamic working conditions, an easy inverse axial mounting stiffness design method is developed in this article. Imaging quality deterioration at the wafer under different axial vibration levels is analyzed. The desired image quality can be determined according to practical requirements, and axial vibrational tolerance of each lens is solved with the damped least-squares method. Based on adaptive interval adjustment, a binary search algorithm, and the finite element method, the axial mounting stiffness of each lens can be traveled in a large interval, and converges to a moderate numerical solution which makes the axial vibrational amplitude of the lens converge to its axial vibrational tolerance. Model simulation is carried out to validate the effectiveness of the method. (C) 2014 Optical Society of America
收录类别SCI ; EI
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/44105
专题中科院长春光机所知识产出
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Yuan Q.,Shang H. B.,Zhang W.. Inverse axial mounting stiffness design for lithographic projection lenses[J]. Applied Optics,2014,53(25):5720-5725.
APA Yuan Q.,Shang H. B.,&Zhang W..(2014).Inverse axial mounting stiffness design for lithographic projection lenses.Applied Optics,53(25),5720-5725.
MLA Yuan Q.,et al."Inverse axial mounting stiffness design for lithographic projection lenses".Applied Optics 53.25(2014):5720-5725.
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