CIOMP OpenIR  > 中科院长春光机所知识产出
Influence of the growth temperature of AlN nucleation layer on AlN template grown by high-temperature MOCVD
Chen Y. R.; Song H.; Li D. B.; Sun X. J.; Jiang H.; Li Z. M.; Miao G. Q.; Zhang Z. W.; Zhou Y.
2014
发表期刊Materials Letters
ISSNISBN/0167-577X
卷号114期号:26-28
摘要We studied the influence of the growth temperature of AlN nucleation layer (T-NL) on the AlN template grown by high-temperature metal-organic chemical vapor deposition (HT-MOCVD). The AlN templates were characterized by high-resolution X-ray diffractometer, atomic force microscopy and room-temperature Raman scattering spectrometer. The results revealed that the T-NL had a direct influence on the quality of the AlN template. By optimizing the T-NL at 950 degrees C, we obtained a high-quality AlN template with the full width at half maxima for the (0002) and (10-12) planes of 90 '' and 612 '', respectively. The AlN template also presented atomic level step with a root mean square (RMS) roughness of 0.133 nm. In addition, it performed excellent single crystallographic orientation along the c-axis. The growth evolution of AlN nucleation layer at different T-NL was also explained in detail. (C) 2013 Elsevier B.V. All rights reserved.
收录类别SCI ; EI
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/44086
专题中科院长春光机所知识产出
推荐引用方式
GB/T 7714
Chen Y. R.,Song H.,Li D. B.,et al. Influence of the growth temperature of AlN nucleation layer on AlN template grown by high-temperature MOCVD[J]. Materials Letters,2014,114(26-28).
APA Chen Y. R..,Song H..,Li D. B..,Sun X. J..,Jiang H..,...&Zhou Y..(2014).Influence of the growth temperature of AlN nucleation layer on AlN template grown by high-temperature MOCVD.Materials Letters,114(26-28).
MLA Chen Y. R.,et al."Influence of the growth temperature of AlN nucleation layer on AlN template grown by high-temperature MOCVD".Materials Letters 114.26-28(2014).
条目包含的文件 下载所有文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
Chen-2014-Influence (1931KB) 开放获取CC BY-ND浏览 下载
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Chen Y. R.]的文章
[Song H.]的文章
[Li D. B.]的文章
百度学术
百度学术中相似的文章
[Chen Y. R.]的文章
[Song H.]的文章
[Li D. B.]的文章
必应学术
必应学术中相似的文章
[Chen Y. R.]的文章
[Song H.]的文章
[Li D. B.]的文章
相关权益政策
暂无数据
收藏/分享
文件名: Chen-2014-Influence of the gro.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。