Growth process parameters of BaTiO3 crystal thin film in PLD method

	Growth process parameters of BaTiO3 crystal thin film in PLD method
	Zhang J.; Fu X.-H.; Yang F.; Yang B.; Sun D.-G.
	2014
发表期刊	Guangzi Xuebao/Acta Photonica Sinica
ISSN	ISBN/10044213
卷号	43 期号:5
摘要	BaTiO3 (BTO) waveguide thin films were prepared by pulsed laser deposition (PLD) on single crystal MgO substrate. In order to improve the crystalline quality and surface roughness, two process parameters of growth temperature and laser energy were studied and optimized, and the film sample was conducted in-situ annealing. The crystallization effect of BTO thin film was found in the first direction. The dependent relations of quality characteristics and growth temperature were analyzed, and the effects of different laser energy on the crystalline film surface roughness were studied. The crystallization effect and characteristic of the film were characterized by X-ray diffraction. The surface morphology and roughness were detected by atomic force microscopy. The results indicate that BTO film could be c-axial oriented film. High strength sharp diffraction peak appeared in the direction of (001) and (002). The film has good crystal quality and small surface roughness of 0.563 nm.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/44020
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang J.,Fu X.-H.,Yang F.,et al. Growth process parameters of BaTiO3 crystal thin film in PLD method[J]. Guangzi Xuebao/Acta Photonica Sinica,2014,43(5).
APA	Zhang J.,Fu X.-H.,Yang F.,Yang B.,&Sun D.-G..(2014).Growth process parameters of BaTiO3 crystal thin film in PLD method.Guangzi Xuebao/Acta Photonica Sinica,43(5).
MLA	Zhang J.,et al."Growth process parameters of BaTiO3 crystal thin film in PLD method".Guangzi Xuebao/Acta Photonica Sinica 43.5(2014).

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