Faithful replication of grating patterns in polymer through electrohydrodynamic instabilities

	Faithful replication of grating patterns in polymer through electrohydrodynamic instabilities
	Li H.; Yu W.; Wang T.; Zhang H.; Cao Y.; Abraham E.; Desmulliez M. P. Y.
	2014
发表期刊	Journal of Micromechanics and Microengineering
ISSN	ISBN/0960-1317
卷号	24 期号:7 页码:9
摘要	Electrohydrodynamic instability patterning (EHDIP) as an alternative patterning method has attracted a great deal of attention over the past decade. This article demonstrates the faithful transfer of patterns with a high aspect ratio onto a polymer film via electrohydrodynamic instabilities for a given patterned grating mask. We perform a simple mathematical analysis to determine the influence of process parameters on the pressure difference Delta P. Through numerical simulation, it is demonstrated that thick films subject to large electric fields are essential to realize this faithful replication. In particular, the influence of the material properties of the polymer on pattern replication is discussed in detail. It is found that, to achieve the smaller periodic patterns with a higher resolution, film with a larger value of the dielectric constant and smaller value of the surface tension should be chosen. In addition, an ideal replication of the mask pattern with a short evolution time is possible by reducing the viscosity of the polymer liquid. Finally, the experiments of the pattern replication with and without defects are demonstrated to compare with the numerical simulation results. It is found that experiments are in good agreement with the simulation results and prove that the numerical simulation method provides an effective way to predict faithful replication.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43991
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li H.,Yu W.,Wang T.,et al. Faithful replication of grating patterns in polymer through electrohydrodynamic instabilities[J]. Journal of Micromechanics and Microengineering,2014,24(7):9.
APA	Li H..,Yu W..,Wang T..,Zhang H..,Cao Y..,...&Desmulliez M. P. Y..(2014).Faithful replication of grating patterns in polymer through electrohydrodynamic instabilities.Journal of Micromechanics and Microengineering,24(7),9.
MLA	Li H.,et al."Faithful replication of grating patterns in polymer through electrohydrodynamic instabilities".Journal of Micromechanics and Microengineering 24.7(2014):9.

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