Fabrication of micro-optical elements on curved substrates by electrostatic induced lithography

	Fabrication of micro-optical elements on curved substrates by electrostatic induced lithography
	Li H.; Yu W.; Wang T.; Zhang H.; Niu W.; Abraham E.; Desmulliez M. P. Y.
	2014
发表期刊	Rsc Advances
ISSN	ISBN/2046-2069
卷号	4 期号:72 页码:38379-38383
摘要	This article reports the fabrication and characterization of polymeric micro-optical elements on curved substrates using electrostatic induced lithography. Unlike previous studies focusing upon the pattern formation on planar substrates, we have extended this process by adding it to the micro-transfer molding process to obtain micro-optical elements like diffractive grating and microlenses on curved substrates with aspect ratio greater than 4 : 1. The optical test results of the fabricated micro-optical elements show a slight deviation from theoretical values due to the effect of the curved surface. In comparison with previous reported methods, e. g. laser direct writing or the capillary force lithography method, the method proposed here is faster and more flexible. More importantly, microstructures with high aspect ratio can be easily obtained, which is normally difficult for the two methods reported previously. Therefore, this technology can be used as an effective method for the fabrication of such components with microscale or even nanoscale feature size on curved surfaces.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43987
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li H.,Yu W.,Wang T.,et al. Fabrication of micro-optical elements on curved substrates by electrostatic induced lithography[J]. Rsc Advances,2014,4(72):38379-38383.
APA	Li H..,Yu W..,Wang T..,Zhang H..,Niu W..,...&Desmulliez M. P. Y..(2014).Fabrication of micro-optical elements on curved substrates by electrostatic induced lithography.Rsc Advances,4(72),38379-38383.
MLA	Li H.,et al."Fabrication of micro-optical elements on curved substrates by electrostatic induced lithography".Rsc Advances 4.72(2014):38379-38383.

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