Analysis and experiments of the thermal-optical performance for a kinematically mounted lens element

	Analysis and experiments of the thermal-optical performance for a kinematically mounted lens element
	Yu X. F.; Ni M. Y.; Zhang W.; Sui Y. X.; Qin S.
	2014
发表期刊	Applied Optics
ISSN	ISBN/1559-128X
卷号	53 期号:18 页码:4079-4084
摘要	In order to evaluate the thermal-optical performance of a kinematic mounting applied in lithographic projection lens, the optical surface figure and wavefront changes of the lens element under a certain thermal load are investigated with both experimental and numerical simulation methods. From the experimental and numerical results, the temperature on the edge of the lens element rises up to 22.51 degrees C, and the center of lens is 5.3 degrees C higher. As a result, this thermal nonuniformity leads to a 9.622 nm RMS change of the optical surface figure and 71.905 nm RMS change of the index inhomogeneity, consisting mainly of Z4, Z9, and Z16. Because of the radial flexibility of the supporting legs of the kinematic mounting, aberrations such as pri trefoil and sec trefoil are less than 2% of the total wavefront changes, and other nonaxisymmetric aberrations are negligible. The Zernike coefficient differences between experiments and simulation are less than 2 nm, which supports the correctness of our method. The kinematic mounting shows good thermal adaptability, and the method for evaluation of the thermal-optical characteristics is proved effective. (C) 2014 Optical Society of America
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43730
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yu X. F.,Ni M. Y.,Zhang W.,et al. Analysis and experiments of the thermal-optical performance for a kinematically mounted lens element[J]. Applied Optics,2014,53(18):4079-4084.
APA	Yu X. F.,Ni M. Y.,Zhang W.,Sui Y. X.,&Qin S..(2014).Analysis and experiments of the thermal-optical performance for a kinematically mounted lens element.Applied Optics,53(18),4079-4084.
MLA	Yu X. F.,et al."Analysis and experiments of the thermal-optical performance for a kinematically mounted lens element".Applied Optics 53.18(2014):4079-4084.

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