Alignment technology for double-fiber phase-shifting point diffraction interferometer

	Alignment technology for double-fiber phase-shifting point diffraction interferometer
	Zhang Y.; Jin C.; Ma D.; Wang L.
	2014
发表期刊	Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
ISSN	ISBN/10072276
卷号	43 期号:1 页码:145-150
摘要	In order to measure the wavefront aberration of the EUVL objective system with the super high accuracy, the double-fiber phase-shifting point diffraction interferometer was introduced, its working principle was introduced, and the adjustment scheme of interferometer was designed critically. All the components were positioned accurately, the test beam and reference beam were ensured to be strictly vertical, the maximum coupling efficiency between the coupling system and optical fiber and maximum fringe contrast were realized, which provided preparation for ultimately ultra high precision test of the wavefront aberration of EUVL objective system. After the alignment was completed, an optical system was measured by the experimental device, the tested optical system wavefront aberration was restored by the 13-frame phase-shifting algorithm, the good results were obtained. The results are: PV value is 37.82 nm, RMS value is 7.83 nm.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43719
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang Y.,Jin C.,Ma D.,et al. Alignment technology for double-fiber phase-shifting point diffraction interferometer[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2014,43(1):145-150.
APA	Zhang Y.,Jin C.,Ma D.,&Wang L..(2014).Alignment technology for double-fiber phase-shifting point diffraction interferometer.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,43(1),145-150.
MLA	Zhang Y.,et al."Alignment technology for double-fiber phase-shifting point diffraction interferometer".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 43.1(2014):145-150.

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