Active compensation of thermal aberrations in lithographic projection lens

	Active compensation of thermal aberrations in lithographic projection lens
	Chen H.; Su D.; Sui Y.; Zhang M.; Tian W.; Yang H.; Zhang W.
	2014
发表期刊	Guangxue Xuebao/Acta Optica Sinica
ISSN	ISBN/02532239
卷号	34 期号:8
摘要	Thermal aberrations caused by absorption of laser energy are the key factors that make the image performance of lithographic projection lens degrade. Compensation of thermal aberrations is inevitable. A new compensation method of wavefront aberrations by controllable heating of a lens using film heater matrix is presented. For the refractive index of glass changes with temperature, heating on the periphery of a lens will produce a controlled wavefront change that can compensate for the system's thermal aberrations. The feasibility of the compensation method is validated by compensating the wavefront of a plate lens. The results show that the wavefront of lens changes from 12.52 nm root mean square (RMS) to 2.95 nm (RMS) after compensation, indicating that the compensation method is effective and feasible.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43708
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Chen H.,Su D.,Sui Y.,et al. Active compensation of thermal aberrations in lithographic projection lens[J]. Guangxue Xuebao/Acta Optica Sinica,2014,34(8).
APA	Chen H..,Su D..,Sui Y..,Zhang M..,Tian W..,...&Zhang W..(2014).Active compensation of thermal aberrations in lithographic projection lens.Guangxue Xuebao/Acta Optica Sinica,34(8).
MLA	Chen H.,et al."Active compensation of thermal aberrations in lithographic projection lens".Guangxue Xuebao/Acta Optica Sinica 34.8(2014).

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