A thirteen-step phase restoration algorithm in lateral shearing interferometry

	A thirteen-step phase restoration algorithm in lateral shearing interferometry
	Fang C.; Xiang Y.
	2014
发表期刊	Zhongguo Jiguang/中文 Journal of Lasers
ISSN	ISBN/02587025
卷号	41 期号:5
摘要	Lateral shearing interferometer can achieve ultra-high-precision measurement of the optical system aberration. It is currently an important component content of the projection lens development. Two main factors affecting lateral shearing interferometry measurement accuracy are 0th order effect and phase shift error. Therefore, a thirteen-step phase restoration algorithm in phase shearing interferometry is proposed. It can 0th zeroth order effect and greatly reduce the phase shifting error demanding. Analysis shows that when the phase shift error is not more than 25 the phase restoration error is less than 0.01 (2.810-5). For =193.386 nm, wavefront restoration error is less than 0.005 nm. Thus, by system error correction wavefront measurement of projection lens of phase shearing interferometer can achieve sub-nanometer accuracy.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43701
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Fang C.,Xiang Y.. A thirteen-step phase restoration algorithm in lateral shearing interferometry[J]. Zhongguo Jiguang/中文 Journal of Lasers,2014,41(5).
APA	Fang C.,&Xiang Y..(2014).A thirteen-step phase restoration algorithm in lateral shearing interferometry.Zhongguo Jiguang/中文 Journal of Lasers,41(5).
MLA	Fang C.,et al."A thirteen-step phase restoration algorithm in lateral shearing interferometry".Zhongguo Jiguang/中文 Journal of Lasers 41.5(2014).

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