A fast method for calculating the thermal effect in projection objective lenses

	A fast method for calculating the thermal effect in projection objective lenses
	Luo C.; Gong Y.
	2014
发表期刊	Guangxue Xuebao/Acta Optica Sinica
ISSN	ISBN/02532239
卷号	34 期号:7
摘要	A new method is mentioned which can be used to simulate the thermal effect in the projection objective lens with fast speed. The method improves the solving period by separating the all solution to two steps: the first step is to obtain the transfer matrix between intensity distribution of the incident beam and thermal effect (including lens temperature and surface deformation). The second step is to express the intensity distribution with polynomial coefficients and multiply the fitting coefficients by the transfer matrix. The solving-time and the precision of the method are validated by analyzing the thermal effects on three different lenses with 0.2 s to get the node temperature and the Zernike coefficients of the surface deformation, while the general finite element analysis (FEA) method needs 600 s. Another advantage of the new method is that the solving-time isn't lengthened with more nodes. Temperature peak valley (PV) error is 0.002C, and fitting error of Zernike coefficient is 0.005 nm. The accuracy can match the requirement of calculating system aberration.
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43671
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Luo C.,Gong Y.. A fast method for calculating the thermal effect in projection objective lenses[J]. Guangxue Xuebao/Acta Optica Sinica,2014,34(7).
APA	Luo C.,&Gong Y..(2014).A fast method for calculating the thermal effect in projection objective lenses.Guangxue Xuebao/Acta Optica Sinica,34(7).
MLA	Luo C.,et al."A fast method for calculating the thermal effect in projection objective lenses".Guangxue Xuebao/Acta Optica Sinica 34.7(2014).

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