A 2-DOF Piezoelectric Inchworm Actuator for Precise Positioning

	A 2-DOF Piezoelectric Inchworm Actuator for Precise Positioning
	Hua S. M.; Liu G. S.; Lou Y. H.; Li Z. Q.; Meng Y. M.
	2014
发表期刊	Advances in Mechanical Engineering
ISSN	ISBN/1687-8132
卷号	8
摘要	A new rotary-linear inchworm actuator is proposed, where a solid mover can be driven along a vertical axis. The most significant feature of the 2D actuator is that all its flexible hinges for clamping and driving are integrated into a monolithic stator complex. The operational principles of its linear and rotary motion are analyzed. Prototype actuator is manufactured and some main performances are tested. Experimental results about rotary motion are as follows. Angle resolution is 0.3 mu rad, maximum rotational speed is 0.01 rad/s, dynamic torque is 0.38 Nm, and stroke is arbitrary. And those of linear motion are as follows: displacement resolution is 0.019 mu m; maximum velocity and dynamic force are 482 mu m/s and 4 Kgf separately. This proves that the 2D actuator can meet the needs of precise positioning with high force or torque.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/43664
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Hua S. M.,Liu G. S.,Lou Y. H.,et al. A 2-DOF Piezoelectric Inchworm Actuator for Precise Positioning[J]. Advances in Mechanical Engineering,2014,8.
APA	Hua S. M.,Liu G. S.,Lou Y. H.,Li Z. Q.,&Meng Y. M..(2014).A 2-DOF Piezoelectric Inchworm Actuator for Precise Positioning.Advances in Mechanical Engineering,8.
MLA	Hua S. M.,et al."A 2-DOF Piezoelectric Inchworm Actuator for Precise Positioning".Advances in Mechanical Engineering 8(2014).

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