基于镜面间隔和中心偏差测量的光学镜头辅助装调设备的研究

	基于镜面间隔和中心偏差测量的光学镜头辅助装调设备的研究
	郭帮辉
学位类型	博士
导师	孙强
	2014-07
学位授予单位	中国科学院大学
学位专业	光学工程
摘要	光学镜头已经广泛应用于民用、工业检测、国防军事、航空航天等领域，很多应用场合对光学镜头的综合性能的要求越来越高，传统的光学镜头装调方法存在各种问题，已经不能满足高性能光学镜头的装调精度要求。为了提高光学镜头的装调精度，本文研制了光学镜头辅助装调设备，该设备集成了光学镜头的中心偏差测量和镜面间隔测量功能，在同一平台上进行光学镜头的装调，保证了装调过程中的参考轴的一致性，既能提高光学镜头的装调精度，又能提高光学镜头的装调效率。本文的主要研究工作如下：1.根据现有的光学镜头辅助装调设备的技术路线及发展趋势，研究了将光学镜头中心偏差和镜面间隔测量功能集成在一台设备上的技术方案，研究表明，一体化的光学镜头辅助装调设备的技术方案是可行的；2.通过比较光学镜头中心偏差的各种光路结构的优缺点，提出最佳的光路结构设计方案，采用调焦法和切换镜头法相结合的光路结构，能够既保证测量精度，又避免测量盲区；并对调焦法和切换镜头法相结合的光路进行设计，分析了光学系统的成像质量，分析结果表明，该设计方案能够满足使用要求，并在保证像质的基础上，对其公差进行合理分配；建立光线追迹模型，分析杂散光的影响，分析结果表明，杂散光对成像质量的影响很小；3.建立被测光学镜头的中心偏差计算模型，该模型能够计算被测光学镜头的各个镜面的球心像的位置和成像过程中的垂轴放大率，还能根据十字靶标中心的画圆直径和十字靶标成像过程中的垂轴放大率，计算被测镜面的中心偏差，该计算模型为主控软件提供了中心偏差测量的算法；4.研究非接触式的光学镜面间隔测量方法，采用了光学相干测量的方法来测量镜面间隔，以迈克尔逊干涉仪为基础，利用光纤来传导光束，便于测量设备的组装和应用；设计了测量臂中的光纤调焦镜头，能够使光斑聚焦点在一定范围内连续调焦，保证被测光学镜头中的各个镜面反射的光能量在光电探测器的动态范围内；建立了光学相干测量中的材料色散与相干信号之间的数学模型，利用该模型，能够根据采集到的相干信号和玻璃材料的色散，计算镜面的间隔；5.编写光学镜头辅助装调系统的主控软件，在镜面中心偏差测量模块中，研究了十字靶标中心提取算法和球心最佳轴拟合算法；在镜面间隔测量模块中，研究了干涉信号的寻峰算法；6.根据误差理论，对光学镜头辅助装调设备的测量精度进行分析，分析结果表明：光学镜片线偏心的测量总体误差是0.77μm，角偏差的测量总体误差是1.6″，镜面间隔测量总体误差是2.30μm；7.利用研制的光学镜头辅助装调设备，对已知参数的光学镜头进行中心偏差和镜面间隔测量，并进行了中心偏差和镜面间隔测量精度的检测实验，实验结果表明，该设备对于球面的线偏心测量精度优于1μm，对于平面的角偏心测量精度优于2.4″，镜面间隔的测量精度优于3μm。
其他摘要	Optical lenses has been widely used in civil, industrial inspection, national defense and military, aerospace and other fields. Demands for the overall performance of optical lenses are highly increased in many fields. Traditional alignment methods now are unable to meet the assembly precision requirements of the high-performance optical lenses. The optical lenses aided alignment equipment, mentioned in this paper, is designed to improve the precision of the optical lenses alignment. Due to the integrated measurement of lens centre errors and lens centre thicknesses and airgap distances, the equipment finishes the assembly work of the optical lenses on the same table, which ensures the reference axis consistency and increased the precision and efficiency in the optical alignment.This paper’s main research work is as follow:1. Taking into consideration the current technology and the future development trends of optical lenses aided alignment equipment, the paper studies the technical solution of one device combining the measurements of lens centre errors and lens centre thicknesses and airgap distances. Research shows technical solution of the integration of optical lenses aided alignment equipment is feasible.2. By comparing the advantages and disadvantages of various optical pathstructures in measuring lens centre errors, the paper brings up an optimal optical path structure which combined the focusing method and lens-switching method. The optimal structure not only ensures the measurement precision but also avoids problems of blind measuring area. The paper designs the optical structure and analyzes the imaging quality of the optical system. The results of the analysis demonstrate that the design can satisfy the requirements, and ensures the image quality on the basis of a reasonable allocation of its tolerance. The ray tracing model established in the paper also analyzes the effects of stray light on the imaging quality, which turns out to be little.3. The lens centre errors calculation model of the measured optical lenses is established to calculate the image position of every sphere centre and the paraxial magnification in the imaging process. The model can also calculate centre errors of the measured lens according to the diameter of trajectory by the moving of the centre of the cross target and the paraxial magnification of the cross target imaging process. The model provides a method to measure the deviation of the centre for the main control software.4. The paper deals with the measurement method of the Non-contact optical lens thicknesses and airgap distances. The method of optical coherent measurement is used. Based on the Michelson interferometer, the equipment becomes easy to be assembled and applied when optical fiber is used to conduct light. In order to make the reflection intensity from all lens surfaces in the dynamic range of photoelectric detector, a lens used in the measurement arm is designed to change the focus position in a range continuously. A mathematical model between material dispersion and coherence signal is established to calculate lens centre thicknesses and airgap distances.5. The software of the optical lenses aided alignment system is programmed. In the part of measurement of lens centre errors, algorithms of seeking the coordinates of the cross target’s centre and fitting the best axis of all sphere centres are researched. In the part of measurement of lens thicknesses and airgap distances, an algorithm of seeking the peak of coherence signal is researched. 6. According to the theory of errors, the measurement accuracy of optical lenses aided alignment equipment is analyzed. The results show that the total line centre errors of optical lens is 0.77μm, and the total angle centre errors of optical lens is 1.6 arc-seconds, and the total errors of lens centre thicknesses and airgap distances is 2.30μm.7. A measurement of lens centre errors, lens centre thicknesses and airgap distances is taken using the developed optical lenses aided alignment equipment. Experiments of testing the measurement accuracy of lens centre errors, lens centre thicknesses and airgap distances are taken. The results show that the line centre errors measurement accuracy of sphere lens is better than 1μm, and the angle centre errors measurement accuracy of plane lens is better than 2.4 arc-seconds, and the measurement accuracy of lens centre thicknesses and airgap distances is better than 3μm.
语种	中文
文献类型	学位论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/41410
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	郭帮辉. 基于镜面间隔和中心偏差测量的光学镜头辅助装调设备的研究[D]. 中国科学院大学,2014.

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