Wavefront aberration compensation of projection lens using clocking lens elements

	Wavefront aberration compensation of projection lens using clocking lens elements
	Liu C.; Huang W.; Shi Z.; Xu W.
	2013
发表期刊	Applied Optics
ISSN	ISBN/00036935
卷号	52 期号:22
摘要	For extremely high-performance lithographic lenses, the edge level accuracy of the manufacturing process and multicompensation strategies must be applied. Element clocking can be effectively used to compensate for the low-order figure errors of the elements. Considering that commercial optical software is usually incapable of obtaining good convergence for clocking optimization, this paper proposes a mathematical model of a lithographic lens containing the errors of a surface figure, after which a clocking optimization algorithm is programmed. A clocking optimization instance proving that the clocking optimization algorithm is capable of finding the optimized angle of elements and that clocking is an effective compensation strategy. The calculated accuracy of the proposed mathematic model was found to be acceptable for clocking optimization. 2013 Optical Society of America.
收录类别	SCI ; EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/40929
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu C.,Huang W.,Shi Z.,et al. Wavefront aberration compensation of projection lens using clocking lens elements[J]. Applied Optics,2013,52(22).
APA	Liu C.,Huang W.,Shi Z.,&Xu W..(2013).Wavefront aberration compensation of projection lens using clocking lens elements.Applied Optics,52(22).
MLA	Liu C.,et al."Wavefront aberration compensation of projection lens using clocking lens elements".Applied Optics 52.22(2013).

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