Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics

	Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics
	Zhang L. C.; Cai X. K.
	2013
发表期刊	Scientific World Journal
ISSN	ISBN/1537-744X
摘要	An intuitionistic method is proposed to design shadow masks to achieve thickness profile control for evaporation coating processes. The proposed method is based on the concept of the shadow matrix, which is a matrix that contains coefficients that build quantitive relations between shape parameters of masks and shadow quantities of substrate directly. By using the shadow matrix, shape parameters of shadow masks could be derived simply by solving a matrix equation. Verification experiments were performed on a special case where coating materials have different condensation characteristics. By using the designed mask pair with complementary shapes, thickness uniformities of better than 98% are demonstrated for MgF2 (m = 1) and LaF3 (m = 0.5) simultaneously on a 280 mm diameter spherical substrate with the radius curvature of 200 mm.
收录类别	SCI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/40924
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang L. C.,Cai X. K.. Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics[J]. Scientific World Journal,2013.
APA	Zhang L. C.,&Cai X. K..(2013).Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics.Scientific World Journal.
MLA	Zhang L. C.,et al."Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics".Scientific World Journal (2013).