Ultra-smooth polishing of high-precision optical surface

	Ultra-smooth polishing of high-precision optical surface
	Ma Z.; Peng L.; Wang J.
	2013
发表期刊	Optik
ISSN	ISBN/00304026
卷号	124 期号:24
摘要	A new method of ultra-smooth uniform polishing was presented, which can avoid high-precision surface figure getting worse after ultra-smooth polishing. At first, the fundamental and process were introduced. Then the process was simulated with "Gauss" and "V" type removal function. It shows that there will be no significant influence on optical surface figure after ultra-smooth uniform polishing with any type removal function. To demonstrate the process, a high-precision 100 mm fused silica flat optical element was polished, which was prior figured by IBF. Its surface figure accuracy root-mean-square (rms) value is improved from initial 3.624 nm to final 3.393 nm, the mid-spatial frequency surface roughness rms value is improved from initial 0.477 nm to final 0.309 nm, and the high-spatial frequency surface roughness rms value is improved from initial 0.167 nm to final 0.0802 nm. At last, the surface quality of the lens was analyzed by power spectral density (PSD). The result indicates that the surface roughness of high-precision optical element could be improved by ultra-smooth uniform polishing method without the surface figure destroyed. 2013 Elsevier GmbH. All rights reserved.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/40920
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Ma Z.,Peng L.,Wang J.. Ultra-smooth polishing of high-precision optical surface[J]. Optik,2013,124(24).
APA	Ma Z.,Peng L.,&Wang J..(2013).Ultra-smooth polishing of high-precision optical surface.Optik,124(24).
MLA	Ma Z.,et al."Ultra-smooth polishing of high-precision optical surface".Optik 124.24(2013).

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