Microstructure formation in a thick polymer by electrostatic-induced lithography

	Microstructure formation in a thick polymer by electrostatic-induced lithography
	Liu G.; Yu W.; Li H.; Gao J.; Flynn D.; Kay R. W.; Cargill S.; Tonry C.; Patel M. K.; Bailey C.; Desmulliez M. P. Y.
	2013
发表期刊	Journal of Micromechanics and Microengineering
ISSN	ISBN/0960-1317
卷号	23 期号:3
摘要	This article demonstrates the manufacturing of microstructures in a thick polymer using electrostatic-induced lithography. Unlike previous work reported elsewhere, it focuses on the fabrication of structures from meso-to micro-scale. The electrostatic-induced lithography technique is proven to work with not only dc voltage but also ac voltage. Microstructures including microchannels, sinusoidal surface profile microstructures, waveguide core, microlens array and binary Fresnel zone plate have been successfully fabricated. The aspect ratio obtained for some samples is up to 4.5:1. The whole fabrication process is fast, cost-effective in terms of the simple experimental setup and no photosensitive material is needed. This process is expected to find applications in microfluidics, photonics or micro-opto-electro-mechanical systems.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/40752
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu G.,Yu W.,Li H.,et al. Microstructure formation in a thick polymer by electrostatic-induced lithography[J]. Journal of Micromechanics and Microengineering,2013,23(3).
APA	Liu G..,Yu W..,Li H..,Gao J..,Flynn D..,...&Desmulliez M. P. Y..(2013).Microstructure formation in a thick polymer by electrostatic-induced lithography.Journal of Micromechanics and Microengineering,23(3).
MLA	Liu G.,et al."Microstructure formation in a thick polymer by electrostatic-induced lithography".Journal of Micromechanics and Microengineering 23.3(2013).

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