Influence of background pressure on the microstructure and optical properties of Mo/Si multilayers fabricated by magnetron sputtering

	Influence of background pressure on the microstructure and optical properties of Mo/Si multilayers fabricated by magnetron sputtering
	Lv P.; Zhang Z.; Guan J.; Wang X.; Hou X.; Zhang L.; Wang J.; Chen B.; Guan Q.
	2013
发表期刊	Science China: Physics, Mechanics and Astronomy
ISSN	ISBN/16747348
卷号	56 期号:9
摘要	Mo/Si multilayers were fabricated by using magnetron sputtering method at different background pressures: 610-5 Torr, 310 -5 Torr, and 310-6 Torr. The reflectivity of the Mo/Si multilayers increased from 1.93% to 16.63%, and the center wavelength revealed a blue shift to 0.12 nm with the decrease of background pressure. Grazing incident X-ray diffraction (GIXRD) indicated that multilayers fabricated at high background pressure possessed better periodic structure and thinner Mo-on-Si interlayers. Low crystallization degree in (110) preferred the orientation of Mo layers and serious interdiffusion in the Mo/Si multilayers fabricated at low background pressure were observed by transmission electron microscopy (TEM). According to quantitative analysis of microstructural parameters, the Mo layers thickness and thickness ratio of Mo/Si multilayers both decreased and approached the design value gradually by the decrease of background pressure. In addition, the thicknesses of Mo-on-Si and Si-on-Mo interlayers were 1.17 nm and 0.85 nm respectively. It is suggested that the influence of background pressures on the microstructure has a critical role in determining the optical properties of Mo/Si multilayers. 2013 Science China Press and Springer-Verlag Berlin Heidelberg.
收录类别	SCI ; EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/40714
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Lv P.,Zhang Z.,Guan J.,et al. Influence of background pressure on the microstructure and optical properties of Mo/Si multilayers fabricated by magnetron sputtering[J]. Science China: Physics, Mechanics and Astronomy,2013,56(9).
APA	Lv P..,Zhang Z..,Guan J..,Wang X..,Hou X..,...&Guan Q..(2013).Influence of background pressure on the microstructure and optical properties of Mo/Si multilayers fabricated by magnetron sputtering.Science China: Physics, Mechanics and Astronomy,56(9).
MLA	Lv P.,et al."Influence of background pressure on the microstructure and optical properties of Mo/Si multilayers fabricated by magnetron sputtering".Science China: Physics, Mechanics and Astronomy 56.9(2013).

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