In situ observation of two-step growth of AlN on sapphire using high-temperature metal-organic chemical vapour deposition

	In situ observation of two-step growth of AlN on sapphire using high-temperature metal-organic chemical vapour deposition
	Sun X. J.; Li D. B.; Chen Y. R.; Song H.; Jiang H.; Li Z. M.; Miao G. Q.; Zhang Z. W.
	2013
发表期刊	Crystengcomm
ISSN	ISBN/1466-8033
卷号	15 期号:30
摘要	We studied the two-step growth of AlN using high-temperature (HT) metal-organic chemical vapour deposition (MOCVD) using a 405 nm short-wavelength in situ monitoring system. First, an AlN nucleation layer (NL) was grown on sapphire at 950 degrees C before deposition of the HT-AlN film at 1300 degrees C. The 405 nm wavelength in situ reflectance-transient curves revealed the evolution of AlN growth. The reflectance intensity of the 405 nm signal first decreased during AlN growth and then became stronger until it reached a steady state at large and equal amplitude, revealing that the AlN growth underwent a transition from nuclei to nuclei decomposed island recovery to quasi-layer-by-layer growth. The effect of different initial growth conditions on the AlN growth mode was also studied using the in situ monitoring system. The growth mechanism for the films was proposed based on the 405 nm in situ reflectance curves and atomic force microscopy observations. By optimizing the NL growth conditions, we obtained a high-quality AlN/sapphire template with full width at half maxima for the (0002) and (10-12) planes of 60 arcsec and 550 arcsec, respectively. Finally, a high performance PIN-AlGaN detector was fabricated on the AlN template, which further demonstrated its high quality.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/40713
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Sun X. J.,Li D. B.,Chen Y. R.,et al. In situ observation of two-step growth of AlN on sapphire using high-temperature metal-organic chemical vapour deposition[J]. Crystengcomm,2013,15(30).
APA	Sun X. J..,Li D. B..,Chen Y. R..,Song H..,Jiang H..,...&Zhang Z. W..(2013).In situ observation of two-step growth of AlN on sapphire using high-temperature metal-organic chemical vapour deposition.Crystengcomm,15(30).
MLA	Sun X. J.,et al."In situ observation of two-step growth of AlN on sapphire using high-temperature metal-organic chemical vapour deposition".Crystengcomm 15.30(2013).

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