2-nm narrow band pass filter in standard configuration evaporate coating machine

	2-nm narrow band pass filter in standard configuration evaporate coating machine
	Li J.; Goetzelmann R.; Wang X.; Wu J.; Xiao C.
	2013
发表期刊	Chinese Optics Letters
ISSN	ISBN/16717694
卷号	11 期号:SUPPL.1 页码:S10208-1-S10208-2
摘要	High sophisticated optical monitoring systems like the OMS 5000 from Leyboldoptics are commonly used in vacuum coating system to improve the capabilities and reliability of production processes concerning optical performance and repeatability optics. This letter describes a method to perform high end optical filters with additional backside blocking over a wide spectral range. The direct monitoring with intermittent measurement on a large area rotating substrate holder is used to facilitate a narrow band pass filter of 2-nm half bandwidth at 532 nm and high transmittance together with a complex blocking filter to retard disturbing radiation from the ultraviolet (UV) range to the near infrared range. The machine is an ARES 1 350 coating system with basically standard conf iguration. 2013 Chinese Optics Letters.
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/40543
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li J.,Goetzelmann R.,Wang X.,et al. 2-nm narrow band pass filter in standard configuration evaporate coating machine[J]. Chinese Optics Letters,2013,11(SUPPL.1):S10208-1-S10208-2.
APA	Li J.,Goetzelmann R.,Wang X.,Wu J.,&Xiao C..(2013).2-nm narrow band pass filter in standard configuration evaporate coating machine.Chinese Optics Letters,11(SUPPL.1),S10208-1-S10208-2.
MLA	Li J.,et al."2-nm narrow band pass filter in standard configuration evaporate coating machine".Chinese Optics Letters 11.SUPPL.1(2013):S10208-1-S10208-2.

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