Control of N/N2 species ratio in NO plasma for p-type doping of ZnO

	Control of N/N2 species ratio in NO plasma for p-type doping of ZnO
	Zhang ZZ(张振中); Jiang MM(姜明明); Wang SP(王双鹏); Li BH(李炳辉); Dan CX(单崇新); Liu L(刘雷); Zhao DX(赵东旭); Zhao HF(赵海峰); Shen DZ(申德振)
	2011-09-01
发表期刊	Journal of Applied Physics
ISSN	0021-8979
卷号	110 期号:5 页码:53305
收录类别	SCI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/4043
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang ZZ,Jiang MM,Wang SP,et al. Control of N/N2 species ratio in NO plasma for p-type doping of ZnO[J]. Journal of Applied Physics,2011,110(5):53305.
APA	Zhang ZZ.,Jiang MM.,Wang SP.,Li BH.,Dan CX.,...&Shen DZ.(2011).Control of N/N2 species ratio in NO plasma for p-type doping of ZnO.Journal of Applied Physics,110(5),53305.
MLA	Zhang ZZ,et al."Control of N/N2 species ratio in NO plasma for p-type doping of ZnO".Journal of Applied Physics 110.5(2011):53305.