Effect of trimethyl-aluminum preflow on the structure and strain properties of AlN films

	Effect of trimethyl-aluminum preflow on the structure and strain properties of AlN films
	Jia H.; Chen Y.-R.; Sun X.-J.; Li D.-B.; Song H.; Jiang H.; Miao G.-Q.; Li Z.-M.
	2012
发表期刊	Faguang Xuebao/Chinese Journal of Luminescence
ISSN	10007032
卷号	33 期号:1 页码:82-87
摘要	We studied the effects of trimethyl-aluminum (TMAl) preflow on the properties of AlN films grown on (0001) sapphire substrates via metalorganic chemical vapor deposition using high-temperature treatments. Short TMAl preflow treatments had little effect on the surface morphology of the AlN films, but hexagonal islands appeared on the surface when the TMAl preflow time increased. As the preflow time increased, the crystalline quality decreased and the stress state of the AlN films also changed. The origin of this stress behavior can be explained through a combination of extrinsic stress and intrinsic stress.
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/34604
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Jia H.,Chen Y.-R.,Sun X.-J.,et al. Effect of trimethyl-aluminum preflow on the structure and strain properties of AlN films[J]. Faguang Xuebao/Chinese Journal of Luminescence,2012,33(1):82-87.
APA	Jia H..,Chen Y.-R..,Sun X.-J..,Li D.-B..,Song H..,...&Li Z.-M..(2012).Effect of trimethyl-aluminum preflow on the structure and strain properties of AlN films.Faguang Xuebao/Chinese Journal of Luminescence,33(1),82-87.
MLA	Jia H.,et al."Effect of trimethyl-aluminum preflow on the structure and strain properties of AlN films".Faguang Xuebao/Chinese Journal of Luminescence 33.1(2012):82-87.

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