Effect of utilizing hydrogen-treated tantalum anodized oxidation on symmetry of current-voltage characteristic of metal-insulator-metal element

	Effect of utilizing hydrogen-treated tantalum anodized oxidation on symmetry of current-voltage characteristic of metal-insulator-metal element
	Liu H. W.; Wu Y.; Yuan J. F.; Ma K.; Huang X. M.
	1997
发表期刊	Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers
ISSN	0021-4922
卷号	36 期号:12A 页码:7334-7336
摘要	The symmetry of current-voltage (I-V) characteristic of the metal-insulator-metal (MIM) element with the insulator of tantalum anodic oxidation TaOx which is heat-treated in hydrogen (hydrogen-treated) is greatly improved. Meanwhile, the symmetric I-V characteristic, unlike that of the conventional MIM element with tantalum anodic oxidation TaOx which is heat-treated in vacuum (vacuum-treated) or in an oxygen atmosphere, is independent of the choice or top-electrode material. In addition, the making process of the MIM element, with hydrogen-treated TaOx film is less than that of the conventional MIM element with vacuum-treated TaOx film. Considering the oxide layer structure, we present a novel p-n(-)-n band model for MIM element to explain these experimental phenomena.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/34466
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu H. W.,Wu Y.,Yuan J. F.,et al. Effect of utilizing hydrogen-treated tantalum anodized oxidation on symmetry of current-voltage characteristic of metal-insulator-metal element[J]. Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers,1997,36(12A):7334-7336.
APA	Liu H. W.,Wu Y.,Yuan J. F.,Ma K.,&Huang X. M..(1997).Effect of utilizing hydrogen-treated tantalum anodized oxidation on symmetry of current-voltage characteristic of metal-insulator-metal element.Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers,36(12A),7334-7336.
MLA	Liu H. W.,et al."Effect of utilizing hydrogen-treated tantalum anodized oxidation on symmetry of current-voltage characteristic of metal-insulator-metal element".Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers 36.12A(1997):7334-7336.

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