Microstructures of the interlayer in Mo/Si multilayers induced by proton irradiation

	Microstructures of the interlayer in Mo/Si multilayers induced by proton irradiation
	Lv P.; Wang X. D.; Liu H.; Zhang Z. Q.; Guan J. T.; Chen B.; Guan Q. F.
	2012
发表期刊	Science China-Physics Mechanics & Astronomy
ISSN	1674-7348
卷号	55 期号:11 页码:2194-2198
摘要	In this work, the microstructure and optical properties of the Mo/Si multilayers mirror for the space extreme-ultraviolet solar telescope before and after 100 keV proton irradiation have been investigated. EUV/soft X-ray reflectometer (EXRR) results showed that, after proton irradiation, the reflectivity of the Mo/Si multilayer decreased from 12.20% to 8.34% and the center wavelength revealed red shift of 0.38 nm, as compared with those before proton irradiation. High-resolution transmission electron microscopy (HRTEM) observations revealed the presence of MoSi2, Mo3Si and Mo5Si3 in Mo-on-Si interlayers before irradiation. The preferred orientation such as MoSi2 with (101) texture and Mo5Si3 with (310) texture was formed in Mo-on-Si interlayers after proton irradiation, which led to the increase of thickness in the interlayers. It is suggested that the changes of microstructures in Mo/Si multilayers under proton irradiation could cause optical properties degradation.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/34348
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Lv P.,Wang X. D.,Liu H.,et al. Microstructures of the interlayer in Mo/Si multilayers induced by proton irradiation[J]. Science China-Physics Mechanics & Astronomy,2012,55(11):2194-2198.
APA	Lv P..,Wang X. D..,Liu H..,Zhang Z. Q..,Guan J. T..,...&Guan Q. F..(2012).Microstructures of the interlayer in Mo/Si multilayers induced by proton irradiation.Science China-Physics Mechanics & Astronomy,55(11),2194-2198.
MLA	Lv P.,et al."Microstructures of the interlayer in Mo/Si multilayers induced by proton irradiation".Science China-Physics Mechanics & Astronomy 55.11(2012):2194-2198.