Ultra-precise tracking control of piezoelectric actuators via a fuzzy hysteresis model

	Ultra-precise tracking control of piezoelectric actuators via a fuzzy hysteresis model
	Li P. Z.; Yan F.; Ge C.; Zhang M. C.
	2012
发表期刊	Review of Scientific Instruments
ISSN	0034-6748
卷号	83 期号:8
摘要	In this paper, a novel Takagi-Sugeno (T-S) fuzzy system based model is proposed for hysteresis in piezoelectric actuators. The antecedent and consequent structures of the fuzzy hysteresis model (FHM) can be, respectively, identified on-line through uniform partition approach and recursive least squares (RLS) algorithm. With respect to controller design, the inverse of FHM is used to develop a feedforward controller to cancel out the hysteresis effect. Then a hybrid controller is designed for high-performance tracking. It combines the feedforward controller with a proportional integral differential (PID) controller favourable for stabilization and disturbance compensation. To achieve nanometer-scale tracking precision, the enhanced adaptive hybrid controller is further developed. It uses real-time input and output data to update FHM, thus changing the feedforward controller to suit the on-site hysteresis character of the piezoelectric actuator. Finally, as to 3 cases of 50 Hz sinusoidal, multiple frequency sinusoidal and 50 Hz triangular trajectories tracking, experimental results demonstrate the efficiency of the proposed controllers. Especially, being only 0.35% of the maximum desired displacement, the maximum error of 50 Hz sinusoidal tracking is greatly reduced to 5.8 nm, which clearly shows the ultra-precise nanometer-scale tracking performance of the developed adaptive hybrid controller. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4748263]
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/34339
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li P. Z.,Yan F.,Ge C.,et al. Ultra-precise tracking control of piezoelectric actuators via a fuzzy hysteresis model[J]. Review of Scientific Instruments,2012,83(8).
APA	Li P. Z.,Yan F.,Ge C.,&Zhang M. C..(2012).Ultra-precise tracking control of piezoelectric actuators via a fuzzy hysteresis model.Review of Scientific Instruments,83(8).
MLA	Li P. Z.,et al."Ultra-precise tracking control of piezoelectric actuators via a fuzzy hysteresis model".Review of Scientific Instruments 83.8(2012).